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native oxide layer中文是什么意思

  • 自然氧化膜

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  • Native oxide layer
    自然氧化膜
  • 4 the cleanout and the passivation of si surface was carried out by a two - step process to overcome the surface oxide layer and balance the charge between the substrate and epitaxy . by this way , the crystal quality and emission characteristic of zno thin films can be improved , which provide a way to resolve the native oxide layer of si substrate
    4 、通過用等離子體對硅襯底表面進行清洗和鈍化兩步處理,解決硅襯底表面的氧化層和界面電荷平衡問題,制備出了高質(zhì)量的氧化鋅薄膜材料,找到了一條獲得了高質(zhì)量的氧化鋅薄膜的新途徑。
  • In order to otain high quality zno thin films , we , for the first time , employ the plasma enhanced chemical vapor deposition ( pecvd ) to prepare high quality zno thin film at low temperature using a zinc organic source ( zn ( c2h5 ) 2 ) and carbon dioxide ( co2 ) gas mixtures . the effects of the growing condiction and the native oxide layer of si substrate on the quality of zno thin films was studied in detail . to prepare p - zno and overcome the dufficulty of reverse due to the interaction between the n atomic , we obtain high qulaity p - zno by a easy way of thermal zn3n2
    為了在低溫下制備高質(zhì)量的氧化鋅薄膜,我們采用金屬有機源和二氧化碳氣源,首次利用等離子體增強化學氣相沉積的技術在低溫下制備了高質(zhì)量的氧化鋅薄膜,系統(tǒng)地研究了生長條件以及襯底表面氧化層對薄膜質(zhì)量的影響,確定了生長高質(zhì)量氧化鋅薄膜的優(yōu)化條件;為獲得p - zno材料,克服在zno中摻n雜質(zhì)間相互作用影響摻雜效率不易獲得p - zno的困難,我們通過熱氧化zn3n2的方法制備了p - zno ,獲得了一系列研究結(jié)果: 1 、詳細研究了氣體流速比,襯底溫度和射頻功率實驗參數(shù)對氧化鋅薄膜特性的影響。
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